Wetted Material: Standard flowbody- 316 stainless steel; O-ring- Viton
Output Signal: 0~5 VDC Linear min. load 1000Ω
Input Power: 24VDC, 15VDC, 12VDC available
Accuracy: ±1.5% FS (for 10 SCCM~5 SLM, including linearity);
                    ±5% FS (0~25% flow range);
                    ±2% FS (25~100% flow range)
Turn Down Ratio: 50:1
Repeatability: ±0.15% FS or better
Electric Connection: 5 Pin post header (provide with mating connector)
Process Connection: 1/4”NPT female
Range: 0~10 SCCM to 0~50 SLM
Minimum Pressure: 40” H2O
Max. Pressure: 500 psig
Temperature Range : 0~50 ºC
Response Time: 1 second
Temp. Coefficient: 0.05% full scale per 1ºC or better
Pressure Coefficient: 0.01% full scale per PSIG or better
Weight: app. 0.5 kg